JPS5940573A - 半導体集積回路装置の製造方法 - Google Patents

半導体集積回路装置の製造方法

Info

Publication number
JPS5940573A
JPS5940573A JP57152202A JP15220282A JPS5940573A JP S5940573 A JPS5940573 A JP S5940573A JP 57152202 A JP57152202 A JP 57152202A JP 15220282 A JP15220282 A JP 15220282A JP S5940573 A JPS5940573 A JP S5940573A
Authority
JP
Japan
Prior art keywords
film
silicon film
oxide film
forming
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57152202A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0130310B2 (en]
Inventor
Tadashi Hirao
正 平尾
Makoto Hirayama
誠 平山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57152202A priority Critical patent/JPS5940573A/ja
Publication of JPS5940573A publication Critical patent/JPS5940573A/ja
Publication of JPH0130310B2 publication Critical patent/JPH0130310B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/34—Bipolar devices
    • H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions

Landscapes

  • Bipolar Transistors (AREA)
JP57152202A 1982-08-30 1982-08-30 半導体集積回路装置の製造方法 Granted JPS5940573A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57152202A JPS5940573A (ja) 1982-08-30 1982-08-30 半導体集積回路装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57152202A JPS5940573A (ja) 1982-08-30 1982-08-30 半導体集積回路装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5940573A true JPS5940573A (ja) 1984-03-06
JPH0130310B2 JPH0130310B2 (en]) 1989-06-19

Family

ID=15535287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57152202A Granted JPS5940573A (ja) 1982-08-30 1982-08-30 半導体集積回路装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5940573A (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6331167A (ja) * 1986-07-24 1988-02-09 Mitsubishi Electric Corp 半導体装置の製造方法
JPS63188916A (ja) * 1987-01-31 1988-08-04 Kitamura Kiden Kk 帯材走行位置制御装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6331167A (ja) * 1986-07-24 1988-02-09 Mitsubishi Electric Corp 半導体装置の製造方法
JPS63188916A (ja) * 1987-01-31 1988-08-04 Kitamura Kiden Kk 帯材走行位置制御装置

Also Published As

Publication number Publication date
JPH0130310B2 (en]) 1989-06-19

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